Quartz and Silicon Carbide Inventory List

Silicon Carbide and Quartz, Inventory, 5/2018
200mm
Outer Liners
SiC
SiC, 48mm x 13in OD) wall thickness 3/8in PREA01DB 1
Quartz
1105 300771-13 5 One w/ etched finish
Hereaus 1105 300771-13 2
105678-01 Oxide Process 5
105678-04 Oxide Process 4
107387-03-AI Process AVP Tosoh 1
1105 100493-17 4
1105 100535-16 3
Inner Liners
107388 03 AI Process AVP Tosoh 1
Boats
SiC
4 Rail 188 Slot Norton PN 461227, 461228 16
3 Rail SiC 170 Slot 5
3 Rail 139 Slot 1105 100529-12 3
Quartz
107 273 9
170 2040 2
1105 100251-16 4
2603-01 139 slot 3
Pedestals
SiC
SiC Pedestal (See picture) 19
SiC Pedestal (same as above w/ side groove) 3
SiC Pedestal (smaller with hole, sewe pictures) 3
3492249R 1
Quartz
1105 200913 13 (Tosoh # 25854-01 Rev C) Variable Fin 4
Pedestal 11 fin (see pictures for reference if no pn) 10
5 fin w/ 3 studs 108930-02 4
13 fin 7
1105-302125-11 4
1105-300886-13 3
16 fin 5
10 fin 2
Manifold Covers, Shutters, Etc
Quartz
1105 300862-12 5
Exhaust Elbow AVP 25922-01 Rev A 1
146639-001 2
2800160 01 Rev 04 2
Aviza 108865-01-5 Rev 1
Hollow Bar (see picture) 10
1105 200 601 13 4
2105 300 528 11 1
1105 320735 61 A Rev 1 2
1105 301193 13 >20
280 4212 8
2105 3212 71 51 4
2105 3212 70 51-A1 1
2804 719-01 Rev A3 2
1105 302156-61-AI 1
2895609-01 RevA 1
2105 321075-52 4
2105 321075-52 4
1105 300861-12 5
107 310 01 4
108 711 01 2
1105 100531-13 3
1105 100532-13 2
107309-01 5
2105 320932 61-AI Rev1 Variable Fins 6
25956-01 Shutter 284×3(214) 1
1105 301655 11 3
Baffles >23
286 878-01 4
107309-01 1

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