| AMAT Parts | |||
| ASSY Sourece Conditioning Box | 304588R04 | Chamber, Misc | Item#13 |
| PLATE Reference Indicator | 321837-DC | Calibration Tools | Item#162 |
| IND Elect 0-1″Range, .00005″Resln,.001Ac, LCD Display | 321837-DC | Calibration Tools | Item#163 |
| Indicator Dials for Leveling Plate | 0404 0940-0101×5 | Calibration Tools | Item#2006 |
| 0020-7643 RevB | 10102501 32/07 35386 | ||
| Clamp, Air Flex, 8″ Gate Valve | P33 GR05-PE | Item#75 | |
| Cover, Air Chamber Interconnect BD | 403985R01-PE | Mainframe | Item#18 |
| Novellus ASSY/PN 02-267289-02 | S/N TOTO: 071676 | ESC 300mm | |
| Kit Tools, Platform Alignment, AVIZA | |||
| 013075-901-25/PMIO 01 | |||
| 2018225-001 RevA | |||
| 2021717-001 RevA | |||
| 20201716-001 RevA | |||
| 2020521-001 RevA | |||
| 2018243-001 RevA | |||
| 2020595-001 RevA | |||
| Vopex-3KM-SVN-AVIZA | |||
| Tosoh Set C05-5G5KR-Q | 300mm Pre-Clean Kit | ||
| 2012173 | Support Safety, Middle | ||
| 002-63006-003 | 30056500 335 | ||
| 0040 83506 002 | 100000039 | ||
| 51602340-000 Rev4 SS | Chuck 300mm | ||
| 51602559-003 Rev1 SS | Advantest 5571 WWX | ||
| 51602559-003 Rev1 APM | |||
| F02009CN | |||
